Interconnect structure, interconnect layout structure, and manufacturing method thereof

ABSTRACT

An interconnect layout structure having air gaps includes a plurality of air gaps extended along a direction, and at least a first interconnect unit disposed in between the air gaps. The first interconnect unit includes a first conductive line, a first landing mark situated on the first conductive line and a first via structure situated on the first landing mark. The first via structure penetrates the first landing mark and is electrically connected to the first conductive line. And the first landing mark physically separates the air gaps arranged in a straight line.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to an interconnect structure, aninterconnect layout structure, and a manufacturing method thereof, andmore particularly, to an interconnect structure with air gaps, aninterconnect layout structure with air gaps and manufacturing methodthereof.

2. Description of the Prior Art

As the semiconductor industry introduced new generations of integratedcircuits (hereinafter abbreviated as ICs) having higher performance andmore functionalilty, the density of elements forming the ICs isincreased, while the size of the semiconductor devices and line width ofthe interconnect structures concurrently are reduced. Consequently, moreissues are created because of such reductions. For example, whendistance between two adjacent conductive lines is reduced, lineresistance (R), and parasitic capacitance (C) are increased, and thusresistance-capacitance time delay (RC delay) is increased. RC delayunwantedly lowers IC computing speed and performance. Moreover,abovementioned adverse impact from RC delay is increased when the linewidth of the ICs is smaller than 0.15 and/or 0.13 micrometer (μm).

Since RC delay is determined by the product of the line resistance andparasitic capacitance of the conductive line, as a countermeasureagainst to the problem, there has been proposed to use conductivematerials with lower capacitance, or to lower the parasitic capacitancebetween the two conductive lines. Furthermore, since the parasiticcapacitance is related to dielectric constant (k) of the insulatingmaterial between the two conductive lines, it can be reduced when theinsulating material(s) having lower dielectric constant is adopted.Additionally, insulating material(s) having dielectric constant lowerthan 2.5-3.5, also known as low-k insulating material(s) not onlyreduces parasitic capacitance and RC delay, but also reduces powerconsumption. Consequently, adoption of low-k dielectric materialsoptimize performance of the interconnect structure in a ultra largescale integration (ULSI).

Furthermore, air is used as an insulating material between theconductive lines because dielectric constant of air is about 1.Additionally, air gap not only reduces RC delay, but also has advantageof low heat conductivity. Although the formation of air gaps reduces theparasitic capacitance, the conventional process suffers from otherdrawbacks. For example, air gap is not strong enough to support theconductive lines and thus reliability issue is generated. Furthermore,the formation of air gaps is a complicated processing and cannot be madein a mass production. Accordingly, a method for manufacturing theinterconnect structure with air gaps is still in need.

SUMMARY OF THE INVENTION

According to an aspect of the present invention, a method formanufacturing an interconnect structure with air gaps is provided. Themethod for manufacturing the interconnect structure with air gapsincludes following steps: A substrate including a first insulating layerformed thereon is provided. And a plurality of conductive lines areformed in the first insulating layer. Next, a patterned hard mask isformed on the first insulating layer and the conductive lines. Thepatterned hard mask exposes portions of the first insulating layer andportions of the conductive lines. Then, the exposed portions of thefirst insulating layer are removed to form a plurality of recesses inthe first insulating layer and followed by forming a second insulatinglayer and a third insulating layer in the recesses to seal the recessesand to form a plurality of air gaps respectively in the recesses. Atleast two air gaps are respectively formed at two sides of oneconductive line of the plurality of conductive lines. Then, a viastructure is formed on the one conductive line.

According to an aspect of the present invention, an interconnectstructure with air gap is provided. The interconnect structure with airgap includes a substrate including an insulating material disposedthereon, a conductive line disposed in the insulating material, at leastan air gap disposed in the insulating material and immediately adjacentto the conductive line, a landing mark disposed on the conductive line,and a via structure formed on the landing mark. And the via structure iselectrically connected to the conductive line.

According to an aspect of the present invention, an interconnect layoutstructure with air gaps is provided. The interconnect layout structureincludes a plurality of air gaps extended along a direction, and atleast a first interconnect unit disposed in between the air gaps. Thefirst interconnect unit includes a first conductive line, a firstlanding mark disposed on the first conductive line, and a first viastructure disposed on the first landing mark, the first via structurepenetrating the first landing mark and being electrically connected tothe first conductive line. The air gaps arranged in a straight line, orarranged in a same column, are physically separated from each other bythe first landing mark.

According to the interconnect structure with air gaps, the interconnectlayout structure with air gaps, and manufacturing method thereofprovided by the present invention, at least an interconnect unitincluding the conductive line, the landing mark, and the via structureis provided. The interconnect unit is inserted into and arranged in theinterconnect structure and/or the interconnect layout structuredepending on different product requirements, and the landing mark of theinterconnect unit physically separates the air gaps arranged in astraight line from each other. And the interconnect unit(s) insertedinto the interconnect structure with air gaps and the interconnectlayout structure with air gaps provides structural support.Consequently, the mechanical strength of the whole interconnectstructure is improved. Furthermore, since the interconnect unit can beintroduced into the interconnect structure at where it is required, thepresent invention further simplifies routing design for the interconnectstructure.

These and other objectives of the present invention will no doubt becomeobvious to those of ordinary skill in the art after reading thefollowing detailed description of the preferred embodiment that isillustrated in the various figures and drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A-4B are schematic drawings illustrating a method formanufacturing an interconnect structure with air gaps provided by afirst preferred embodiment of the present invention, wherein

FIG. 1B is a cross-sectional view taken along a line B-B′ of FIG. 1A.

FIG. 2A is a schematic drawing in a step subsequent to FIG. 1A,

FIG. 2B is a cross-sectional view taken along a line B-B′ of FIG. 2A,

FIG. 3A is a schematic drawing in a step subsequent to FIG. 2A,

FIG. 3B is a cross-sectional view taken along a line B-B′ of FIG. 3A,

FIG. 3C is a cross-sectional view taken along a line C-C′ of FIG. 3A,

FIG. 4A is a schematic drawing in a step subsequent to FIG. 3A,

FIG. 4B is a cross-sectional view taken along a line B-B′ of FIG. 4A,

FIGS. 5A-5B are schematic drawings respectively illustrating aninterconnect layout structure with air gaps and an interconnectstructure with air gaps provided by a second preferred embodiment of thepresent invention,

FIGS. 6A-6B are schematic drawings respectively illustrating aninterconnect layout structure with air gaps and an interconnectstructure with air gaps provided by a third preferred embodiment of thepresent invention,

FIGS. 7A-7B are schematic drawings respectively illustrating aninterconnect layout structure with air gaps and an interconnectstructure with air gaps provided by a fourth preferred embodiment of thepresent invention, and

FIGS. 8A-8C are schematic drawings illustrating an interconnect layoutstructure with air gaps provided by a fifth preferred embodiment of thepresent invention.

DETAILED DESCRIPTION

In the following description, numerous specific details are set forth,such as particular structures, components, materials, dimensions,processing steps and techniques, in order to provide a thoroughunderstanding of the present invention. However, it will be appreciatedby one of ordinary skill in the art that the invention may be practicedwithout these specific details. In other instances, well-knownstructures or processing steps have been described in detail in order toavoid obscuring the invention.

It will be understood that when an element is referred to as being“formed” on another element, it can be directly or indirectly, formed onthe given element by growth, deposition, etch, attach, connect, orcouple. And it will be understood that when an elements or a layer isreferred to as being “on”, “connected to”, or “coupled to” anotherelement or layer, it can be directly on, connected or coupled to theother element or layer or intervening elements or layers may be present.

It will be understood that, although the terms first, second, etc. maybe used herein to describe various elements, components, regions, layersand/or sections, these elements, components, regions, layers and/orsections should not be limited by these terms. These terms are only usedto distinguish one element, component, region, layer and/or section fromanother. Thus, a first element, component, region, layer or sectiondiscussed below could be termed a second element, component, region,layer or section without departing from the teachings of the disclosure.

Spatially relative terms, such as “beneath”, “below”, “lower”, “above”,“upper”, “in”, “on” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. It will beunderstood that spatially relative terms are intended to encompassdifferent orientations of the device in use or operation in addition tothe orientations depicted in the figures. For example, if the device inthe figures in turned over, elements described as “below” or “beneath”can encompass both an orientation of above and below. The device may beotherwise oriented (rotated 90 degrees or at other orientations) and thespatially relative descriptors used herein interpreted accordingly.

The terminology used herein is for the purpose of describing particularembodiments and is not intended to be limiting of the inventions. Asused herein, the singular form “a”, “an” and “the” are intended toinclude the plural forms as well, unless the context clearly indicatesotherwise.

Please refer to FIGS. 1A-4B, which are schematic drawing illustrating amethod for manufacturing an interconnect structure with air gapsprovided by a first preferred embodiment of the present invention.Please refer to FIGS. 1A and 1B, wherein FIG. 1B is a cross-sectionalview taken along a line B-B′ of FIG. 1A. As shown in FIGS. 1A and 1B,the preferred embodiment provides a substrate 100, and an active circuit(not shown) is disposed in the substrate 100. It should be easilyunderstood to those skilled in the art that the active circuit mayinclude a plurality of metal-oxide-semiconductor (hereinafterabbreviated as MOS) transistors (not shown) or other devices. And aplurality of shallow trench isolations (STIs) (not shown) can beprovided to isolate those devices. A first insulating layer 112 isformed on the substrate 100, and a plurality of conductive lines 120 areformed in the first insulating layer 112. According to one embodiment ofthe present invention, the first insulating layer 112 can be aninterlayer-dielectric (ILD) layer, and the conductive lines 120 can begate lines of the MOS transistors or conductive lines of other devicesin the active circuit. Therefore the conductive lines 120 can includepolysilicon or conductive material, but not limited to this. Accordingto another embodiment of the present invention, the first insulatinglayer 112 can be an inter-metal dielectric (hereinafter abbreviated asIMD) layer, and the conductive line 120 can be the metal wires formed inthe IMD layer. Therefore the conductive lines 120 can include conductivematerial such as copper, tungsten, aluminum or alloy of theabovementioned metals. Typically speaking, the metal wires are defineddepending on where it is placed. For example, the metal wires areupwardly defined as a first metal layer M1, a second metal layer M2, . .. and so on to an nth metal layer Mn. The first insulating layer 112used to electrically isolate the conductive lines 120 can includeboro-phospho-silicate glass (BPSG), phosphor-silicate glass (PSG),tetra-ethyl-ortho-silicate (TEOS), low-k dielectric material such asblack Diamond® available from Applied Materials, Inc. of Santa Clara,Calif., fluorinated silica glass (FSG), porous low-k dielectricmaterial, or self-assembled dielectric material, but not limited tothis. As shown in FIG. 1A, the conductive lines 120 are extended along afirst direction D1.

Please still refer to FIGS. 1A and 1B. Next, a hard mask layer is formedon the substrate 100, and followed by performing a photolithographyprocess: A photoresist pattern 132 is used to pattern the hard masklayer and thus a patterned hard mask 130 is obtained as shown in FIGS.1A and 1B. According to the preferred embodiment, the hard masklayer/the patterned hard mask 130 can include silicon carbonitride(hereinafter abbreviated as SiCN), silicon carbide (hereinafterabbreviated as SiC), or silicon oxynitride (hereinafter abbreviated asSiON), but not limited to this. Since the steps of the photolithographyprocess and materials used in the photolithography process are allconventionally known to those skilled in the art, those details areomitted in the interest of brevity. It is noteworthy that the patternedhard mask 130 is extended along a second direction D2, and the seconddirection D2 is perpendicular to the first direction D1. As shown inFIG. 1A, the patterned hard mask 130 covers portions of the firstinsulating layer 112 and portions of the conductive lines 120. In otherwords, the patterned hard mask 130 exposes portions of the firstinsulating layer 112 and portions of the conductive lines 120.

Please refer to FIGS. 2A and 2B, wherein FIG. 2B is a cross-sectionalview taken along a line B-B′ of FIG. 2A. As shown in FIGS. 2A and 2B, anetching process 134 is performed to remove the exposed portions of firstinsulating layer 112, and thus a plurality of recesses 140 are formed inthe first insulating layer 112. As shown in FIG. 2A, the recesses 140include stripe shape. In detail, the etching process 134 is to removethe exposed portions of the first insulating layer 112 formed in twoadjacent conductive lines 120, and thus the recesses 140 are obtained intwo adjacent conductive lines 120 as shown in FIGS. 2A and 2B. It shouldbe noted that the stripe-shaped recesses 140 are ended at where thepatterned hard mask 130 and the photoresist pattern 132 are disposed.Preferably, the above mentioned etching process 134 is an etchingprocess to which the conductive lines 120 are impervious. Furthermore,by adjusting process parameters of the etching process 134, the firstinsulating layer 112 in the recess 140 can be still remained onsidewalls and a bottom of the recesses 140 as shown in FIG. 2B.Alternatively, by adjusting process parameters of the etching process134, the first insulating layer 112 in the recess 140 can be completelyremoved. After forming the recesses 140, the photoresist pattern 132 isremoved.

Please refer to FIGS. 3A-3B, wherein FIG. 3B is a cross-sectional viewtaken along a line B-B′ of FIG. 3A, and FIG. 3C is a cross-sectionalview taken along a line C-C′ of FIG. 3A. Next, a second insulating layer114 is blanketly formed on the substrate 100, particularly on the firstinsulating layer 112, the recesses 140 and the patterned hard mask 130.The second insulating layer 114 covers surfaces of the recesses 140 andtop surfaces of the patterned hard mask 130 as shown in FIGS. 3B and 3C.Furthermore, an etching rate of the second insulating layer 114 ispreferably different from an etching rate of the first insulating layer112. The second insulating layer 114 can include SiCN, SiC, or SiON, butnot limited to this. As shown in FIG. 3B, an overhang is spontaneouslyformed on openings of the recesses 140. Consequently, opening width ofeach recess 140 is reduced.

Please still refer to FIGS. 3A-3C. After forming the second insulatinglayer 114, a third insulating layer 116 is formed on the substrate 100,particularly on the second insulating layer 114. An etching rate of thethird insulating layer 116 is preferably different from the etching rateof the second insulating layer 114. It is noteworthy that the thirdinsulating layer 116 further reduces the opening with of each recess140, which has been already reduced by forming the second insulatinglayer 114. Consequently, the recesses 140 are sealed by the thirdinsulating layer 116 and thus air gaps 150 are respectively formed inthe recesses 140, as shown in FIGS. 3A-3C. In other words, the air gaps150 are sealed within the third insulating layer 116. It is noteworthythat the air gaps 150 can be formed in between two adjacent conductivelines 120 and immediately adjacent to the conductive lines 120. In otherwords, two air gaps 150 are formed at two opposite sides of at least oneconductive line 120 of the plurality of the conductive line 120. And theconductive lines 120 are physically and electrically isolated from theair gaps 150 by an insulating material 110 formed on the substrate 100.In one embodiment of the present invention, the insulating material 110can upwardly and sequentially includes the first insulating layer 112,the second insulating layer 114, and the third insulating layer 116 asshown in FIGS. 3B and 3C. However, in other embodiments of the presentinvention, when the first insulating layer 112 not overlapped by thepatterned mask 130 is completely removed, the insulating material 110can upwardly and sequentially include the second insulating layer 114and the third insulating layer 116. Briefly speaking, the air gaps 150are formed within the insulating material 110 and physically andelectrically isolated from the conductive lines 120 by the insulatingmaterial 110.

Please refer to FIGS. 4A and 4B, wherein FIG. 4B is a cross-sectionalview taken along a line B-B′ of FIG. 4A. As mentioned above, theconductive lines 120 are extended along the first direction D1 while thepatterned hard mask 130 is extended along the second direction D2.Therefore the patterned hard mask 130 and the second insulating layer114 cross the conductive lines 120, that is, portions of the patternedhard mask 130 and the second insulating layer 114 overlap the conductivelines 120 and overlap portions of the first insulating layer 112 at thesides of the conductive lines 120. This specific portions of thepatterned hard mask 130 and the second insulating layer 114 serve as alanding mark 152, as shown in FIGS. 4A and 4B. Thereafter, someconductive lines are picked out for constructing electrical connectionand thus defined as conductive lines 120′ depending on different productrequirements. And an openings (not shown) penetrating the patterned hardmask 130 and the second insulating layer 114 are formed on the landingmark 152 on the conductive lines 120′. Thus, the conductive lines 120′are exposed at bottoms of the openings. Next, a conductive layer isformed to fill the openings and followed by performing a planarizationto remove superfluous materials. Thus, via structures 160 are formed onthe conductive lines 120′ as shown in FIGS. 4A and 4B. It should bewell-known to those skilled in the art that before forming theconductive layer in the openings, other required layers such as barrierlayer(s) can be formed. However, since those layer(s) is well-known tothose skilled in the art, those details are omitted in the interest ofbrevity. As mentioned above, in some embodiments of the presentinvention, the conductive lines 120′ can be the gate lines of MOStransistors or conducive wires of other devices, therefore the viastructures 160 serve as gate contact plugs electrically connecting thegate lines to other devises. Or, the via structures 160 serve as contactplugs electrically connecting the given devices to other devises.Alternatively, in some embodiments of the present invention, theconductive line 120′ can be metal wires in the IMD layer and thus thevia structures 160 serve as via structures electrically connecting thenth conductive lines to the (n+1)th conductive lines.

Please refer to FIGS. 4A and 4B again. Consequently, the presentinvention provides an interconnect structure 200 with air gaps 150. Theinterconnect structure 200 with air gaps 150 includes the conductiveline 120′ formed in the insulating material 110, the landing mark 152formed on the conductive lines 120′, and the via structures 160 formedon the conductive lines 120′. The via structures 160 penetrate thelanding marks 152 and thus are electrically connected the conductivelines 120′, respectively. As shown in FIG. 4B, sidewalls of the viastructures 160 contact the patterned hard mask 130, the secondinsulating layer 114, and the third insulating layer 116. Additionally,the insulating material 110 can include the first insulating layer 112,the second insulating layer 114, and the third insulating layer 116. Inthis case, the conductive lines 120′ are physically and electricallyisolated from the air gaps 150 by the first insulating layer 112, thesecond insulating layer 114 and the third insulating layer 116. In someembodiments of the present invention, the insulating material 110 caninclude merely the second insulating layer 114 and the third insulatinglayer 116, and thus the conductive lines 120′ are physically andelectrically isolated from the air gaps 150 by the second insulatinglayer 114 and the third insulating layer 116. More important, the “viastructure 160-landing mark 152-conductive line 120” structure serves asan interconnect unit 170. That is, any interconnect unit 170 includesthe abovementioned conductive line 120′, the landing mark 152 on theconductive line 120′ and the via structure 160 on the landing mark 152.The via structure 160 penetrate the landing mark 152, and thus iselectrically connected to the conductive line 120′. Also, as shown inFIG. 4A, the present invention provides an interconnect layout structure200′ with air gaps 150. The interconnect layout structure 200′ includesa plurality of air gaps 150 extended along the first direction D1. Thepresent invention further provides at least an interconnect unit 170disposed in the interconnect layout structure 200′, and the landing mark152 of the interconnect unit 170 separates the air gaps 150. In detail,the landing mark 152 of the interconnect unit 170 is disposed in betweentwo air gaps 150 arranged in a straight line, or arranged in a samecolumn, as shown in FIG. 4A. In other words, the air gaps 150 arrangedin the same column are physically separated from each other by thelanding mark 152 of the interconnect unit 170. Furthermore, theinterconnect layout structure 200′ includes a plurality of insulatingmaterial patterns 110. It is noteworthy that the interconnect unit 170can include the insulating material patterns 110 which is disposed atthe two opposites sides of the conductive line 120′. More than that, thelanding mark 152 of the interconnect unit 170 covers portions of theabovementioned insulating material patterns 110 as shown in FIG. 4B.According to the preferred embodiment, the air gaps 150 arranged in thestraight line, or arranged in a same column, are physically spaced apartfrom each other by the landing mark 152 of the interconnect unit 170 andthe underneath insulating material patterns 110. Consequently, theinsulating material patterns 110 of the interconnect unit 170 contactthe air gaps 150.

More important, the interconnect units 170 provided by the presentinvention can be inserted into or arranged in the interconnect layoutstructure 200′ at where it is required. For example, in some embodimentsof the present invention, the interconnect units 170 are arranged in theinterconnect layout structure 200′ along the second direction D2 andthose interconnect units 170 are spaced apart from each other.Alternatively, those interconnect units 170 arranged in the interconnectlayout structure 200′ can contact each other, as shown in FIGS. 4A and4B. Since the conductive lines 120 of the embodiment are all arrangedalong the first direction D1 and the interconnect units 170 are insertedin to the conductive lines 120 at where it is required, the conductivelines 120 are taken as disposed at two sides of the interconnect units170, and the conductive lines 120 physically contact the conductivelines 120′ in the interconnect units 170 while the insulating materialpatterns 110 are arranged at the other two sides of the conductive lines120. More important, the landing marks 152 and the insulating materialpatterns 110 of the interconnect unit 170 separate the air gaps 150arranged in the straight line, or arranged in a same column. It shouldbe noted that though the conductive lines 120′ of the interconnect units170 and the conductive lines 120 are designated by different numerals,those skilled in the art should easily realize that the conductive lines120′ of the interconnect units 170 and the conductive lines 120 aresimultaneously formed. In fact, the conductive lines 120′ and theconductive lines 120 are the same elements, but the conductive lines120′ are picked out for building electrical connection and thus the viastructure is formed on the conductive lines 120′.

As mentioned above, the interconnect structure 200 with air gaps 150 andthe interconnect layout structure 200′ with air gaps 150 include theinterconnect unit(s) 170, and the interconnect unit(s) 170 isconstructed by the conductive line 120′ at where the via structure 160is to be formed, the landing mark 152 formed on the conductive line120′, and the via structure 160 formed on the conductive line 120′. Inany interconnect unit 170, there is insulating material 110 disposed onthe two opposite sides of the conductive line 120′. Consequently, theinsulating material 110 disposed at the two opposite sides of theconductive line 120′ provides sufficient mechanical strength while theair gaps 150 provide electrical isolation, and thus parasiticcapacitance is still reduced.

Please refer to FIGS. 5A and 5B, are schematic drawings respectivelyillustrating an interconnect layout structure with air gaps and aninterconnect structure with air gaps provided by a second preferredembodiment of the present invention. It should be noted that elementsthe same in both of the first and second preferred embodiments can beformed by the same processes and steps, and are designated by the samenumerals, thus those details are omitted in the interest of brevity. Itis noteworthy that for clarifying the spatial relationship between theinterconnect unit 170 and other elements, the third insulating layer 116is omitted from FIGS. 5A and 5B. However, those skilled in the art wouldeasily realize placements of those omitted elements such as the thirdinsulating layer 116 according to the abovementioned embodiment.Accordingly, the preferred embodiment provides an interconnect structure200 a and an interconnect layout structure 200 a′. As mentioned above,the interconnect unit 170 provided by the present invention can beinserted to and arranged in the interconnect structure 200 a and theinterconnect layout structure 200 a′ at where it is required. Accordingto the preferred embodiment, at least one single interconnect unit 170is inserted into the interconnect structure 200 a and the interconnectlayout structure 200 a′. However, a plurality of interconnect units 170can be inserted into the interconnect structure 200 a and theinterconnect layout structure 200 a′ for constructing electricalconnections if required. Therefore, FIGS. 5A and 5B serve as exemplarydrawings, but not limited to this. As shown in FIGS. 5A and 5B, theinterconnect unit 170 can be independently placed in the interconnectlayout structure 200 a′ and the interconnect structure 200 a. Accordingto the embodiment, the insulating material patterns 110 are formed atthe two sides of the conductive line 120′ of the interconnect unit 170for providing sufficient mechanical strength. It is also noteworthy thatthe interconnect unit 170 is inserted into the stripe-shaped theconductive lines 120, and thus the landing mark 152 and the insulatingmaterial patterns 110 of the interconnect unit 170 separate the air gaps150 arranged in the straight lines, or arranged in same columns.However, the stripe shape of the air gaps 150 still remains. Moreimportant, the interconnect unit 170, which separates the air gaps 150,is inserted into the interconnect layout structure 200 a′ and theinterconnect structure 200 a at where it is required, and thus theparasitic capacitance and RC delay of the interconnect structure 200 aare reduced by the air gaps 150 while the mechanical strength isimproved by the insulating material patterns 110.

Please refer to FIGS. 6A and 6B, are schematic drawings respectivelyillustrating an interconnect layout structure with air gaps and aninterconnect structure with air gaps provided by a third preferredembodiment of the present invention. It should be noted that elementsthe same in the instant and previous preferred embodiments can be formedby the same processes and steps, and are designated by the samenumerals, thus those details are omitted in the interest of brevity. Itis noteworthy that for clarifying the spatial relationship between theinterconnect unit 170 and other elements, the third insulating layer 116is omitted from FIGS. 6A and 6B. Accordingly, the preferred embodimentprovides an interconnect structure 200 b and an interconnect layoutstructure 200 b′. As mentioned above, the interconnect unit 170 providedby the present invention can be inserted to and arranged in theinterconnect structure 200 b and the interconnect layout structure 200b′ at where it is required. According to the preferred embodiment, aplurality of interconnect units 170 are inserted into the interconnectstructure 200 b and the interconnect layout structure 200 b′. Moreover,those interconnect units 170 contact each other. As shown in FIGS. 6Aand 6B, according to the embodiment, the insulating material patterns110 are formed at the opposite two sides of the conductive line 120′while the conductive line 120 is formed at least one side of theconductive line 120′. Accordingly, the insulating material patterns 110at the opposite two sides of the conductive line 120′ provide mechanicalstrength. It is noteworthy that though the interconnect units 170 areinserted into interconnect structure 200 b/the interconnect layoutstructure 200 b′ and the landing marks 152 of the interconnect units 170separate the air gaps 150 arranged in a same column, the stripe shape ofthe air gaps 150 still remains. More important, the interconnect units170, which separate the air gaps 150, are grouped together and insertedinto the interconnect layout structure 200 b′ and the interconnectstructure 200 b at where it is required, and thus the parasiticcapacitance and RC delay of the interconnect structure 200 b are reducedby the air gaps 150 while the mechanical strength is improved by theinsulating material patterns 110. Furthermore, when the interconnectunits 170 are grouped and inserted into the interconnect layoutstructure 200 b′/the interconnect structure 200 b, the two viastructures 160 include a first distance d1 defined therebetween 160, andthe via structure 160 and a long side of the landing mark 152 include asecond distance d2 defined therebetween. In some embodiments of thepresent invention, the first distance d1 is equal to the second distanced2. In other embodiments of the present invention, the first distance d1is preferably smaller than the second distance d2, and thus processwindow of the via formation is improved.

Please refer to FIGS. 7A and 7B, which are schematic drawingsrespectively illustrating an interconnect layout structure and aninterconnect structure provided by a fourth preferred embodiment of thepresent invention. It should be noted that elements the same in theinstant and previous preferred embodiments can be formed by the sameprocesses and steps, and are designated by the same numerals, thus thosedetails are omitted in the interest of brevity. It is noteworthy thatfor clarifying the spatial relationship between the interconnect unit170 and other elements, the third insulating layer 116 is omitted fromFIGS. 7A and 7B. However, those skilled in the art would easily realizeplacements of those omitted elements such as the third insulating layer116 according to the abovementioned embodiment. Accordingly, thepreferred embodiment provides an interconnect structure 200 c and aninterconnect layout structure 200 c′. As mentioned above, theinterconnect unit 170 provided by the present invention can be insertedto and arranged in the interconnect structure 200 c and the interconnectlayout structure 200 c′ at where it is required. According to thepreferred embodiment, a plurality of interconnect units 170 are insertedinto the interconnect structure 200 c and the interconnect layoutstructure 200 c, and those interconnect units 170 are spaced apart fromeach other. As shown in FIGS. 7A and 7B, according to the embodiment,the insulating material patterns 110 are formed at the opposite twosides of each conductive line 120′. Accordingly, the insulating materialpatterns 110 at the opposite two sides of the conductive lines 120′provide mechanical strength. It is noteworthy that the landing marks 152of the interconnect units 170 are extended along the second directionD2, and covers potions of conductive lines 120 where no via structuresare to be formed (In other words, long sides of the landing mark 152 isperpendicular to the first direction D1). According to abovementionedmethod, the landing mark 152 (including the second insulating layer 114)and the underneath patterned hard mask 130 and first insulating layer112 all work together to improve mechanical strength for the conductivelines 120 even though no via structures are to be formed thereon.Furthermore, the air gaps 150 in the interconnect layout structure 200c′ and the interconnect structure 200 c still provide electricalisolation, and thus parasitic capacitance is reduced.

Please refer to FIGS. 8A-8C, which are schematic drawings illustratingan interconnect layout structure provided by a fifth preferredembodiment of the present invention. It should be noted that elementsthe same in the instant and previous preferred embodiments can be formedby the same processes and steps, and are designated by the samenumerals, thus those details are omitted in the interest of brevity. Itis noteworthy that for clarifying the spatial relationship between theinterconnect unit 170 and other elements, the third insulating layer 116is omitted from FIGS. 8A-8C. However, those skilled in the art wouldeasily realize placements of those omitted elements such as the thirdinsulating layer 116 according to the abovementioned embodiment.Accordingly, the preferred embodiment provides an interconnect structure200 d and an interconnect layout structure 200 d′. In the preferredembodiment, a width W′ of the conductive lines 120′ is larger than awidth W of the conductive line 120 physically connected to theconductive lines 120′, as shown in FIG. 8A. Furthermore, according tothe preferred embodiment, the landing mark 152 is divided into a firstportion 15A which overlaps the conductive line 120′ and a second portion152B which does not overlap the conductive line 120′. More important, awidth WL′ of the first portion 152A is larger than a width WL of thesecond portion 152B as shown in FIG. 8B. Consequently, sufficientprotection rendered from the landing mark 152 to the conductive line120′ which includes the larger width W′ is ensured.

Please refer to FIG. 8C. AS mentioned above, the interconnect units 170provided by the present invention can be inserted to and arranged in theinterconnect layout structure 200 d′ at where it is required. Accordingto the preferred embodiment, a plurality of interconnect units 170 areinserted into the interconnect layout structure 200 d′, and thoseinterconnect units 170 can be formed to contact each other or,alternatively, separately formed as shown in FIG. 8C. It is noteworthythat since the landing mark 152 of the interconnect unit 170 and theinsulating material 110 physically separate the air gaps 150 arranged inthe same column, the air gaps immediately adjacent to the landing mark152 are recognized as air gaps 150′. Furthermore, it can be found thatthe width W′ of the conductive line 120′ is larger the width W theconductive lines 120, and the width WL′ of the first potion 152A of thelanding mark 152 is larger than the width WL of the second portion 152Bof the landing mark 152, therefore a size “a” of the air gaps 150′immediately adjacent to the landing mark 152 is smaller than a size “A”of the air gaps 150 which are not immediately adjacent to the landingmark 152. According to the preferred embodiment, the conductive lines120′ with the larger width W′ is provided to improve process window, theinsulating material patterns 110 at two opposite side of the conductiveline 120′ is provided to improve mechanical strength. It is alsonoteworthy that although the landing marks 152 and the insulatingmaterial patterns 110 of the interconnect unit 170 are inserted toseparate the air gaps 150′ arranged in the straight line and thus thesize “a” of the air gaps 150′ is reduced as shown in FIG. 8C, the stripeshape of the air gaps 150 still remains. More important, since theinterconnect unit 170 is inserted at where it is required, the parasiticcapacitance and RC delay of the interconnect structure 200 d still canbe reduced by the air gaps 150/150′.

According to the interconnect structure with air gaps, the interconnectlayout structure with air gaps, and manufacturing method thereofprovided by the present invention, at least an interconnect unit made of“conductive line-landing mark (the insulating material)-via structure”is provided. The interconnect unit is integrated in the interconnectstructure and/or the interconnect layout structure depending ondifferent product requirements while the landing mark of theinterconnect unit physically separates the air gaps arranged in the samestraight line from each other. In other words, the interconnectstructure with air gaps and the interconnect layout structure with airgaps obtained from performing the method for manufacturing theinterconnect structure with air gaps is to insert the interconnectunit(s) to obtain sufficient mechanical strength from the landing mark(and the insulating material). Consequently, the mechanical strength ofthe whole interconnect structure is improved. Furthermore, it iswell-known to those skilled in the art that in the conventional process,the via structure is made far from the air gaps and thus it suffersinferior reliability because the air gaps provide insufficientmechanical strength. Moreover, since the via structure is made far fromthe air gaps, the process in prior art suffers complicated routingdesign. Different from the prior art, since the interconnect unit can beintroduced into the interconnect structure at where it is required, andthe interconnect unit is formed to immediately adjacent to the air gaps,the present invention further simplifies routing design for theinterconnect structure. It is also noteworthy that the interconnect unitprovided by the present invention can be a dummy interconnect unit: theinterconnect unit is physically and electrically isolated from theconductive lines. Therefore, the dummy interconnect unit is insertedonly for improving mechanical strength without involving theconstruction of electrical connection. Briefly speaking, the presentinvention provides interconnect unit(s) with modularity to improvemechanical strength of the whole interconnect structure while RC delayof the interconnect structure is simultaneously reduced by the air gaps.Furthermore, the interconnect unit/dummy interconnect unit can beinserted into and arranged in the interconnect structure/theinterconnect layout structure at where it is required, and thusprocess/product flexibility is further improved by the presentinvention.

Those skilled in the art will readily observe that numerousmodifications and alterations of the device and method may be made whileretaining the teachings of the invention. Accordingly, the abovedisclosure should be construed as limited only by the metes and boundsof the appended claims.

1. A method for manufacturing an interconnect structure with air gaps,comprising: providing a substrate comprising a first insulating layerformed thereon, and the first insulating layer comprising a plurality ofconductive lines formed therein; forming a patterned hard mask on thefirst insulating layer and the conductive lines, and the patterned hardmask exposing portions of the first insulating layer and portions of theconductive line; removing the exposed portions of the first insulatinglayer to form a plurality of recesses in the first insulating layer;forming a second insulating layer and a third insulating layer in therecesses to seal the recesses and to form a plurality of air gapsrespectively in the recesses, and at least two air gaps beingrespectively formed at two sides of one conductive line of the pluralityof conductive lines; and forming a via structure on the one conductiveline.
 2. The method for manufacturing the interconnect structure withair gaps according to claim 1, wherein the conductive lines are extendedalong a first direction, the patterned hard mask are extended along asecond direction, and the first direction and the second direction areperpendicular to each other.
 3. The method for manufacturing theinterconnect structure with air gaps according to claim 1, wherein thestep of forming the second insulating layer and the third insulatinglayer in the recesses further comprising: blanketly forming the secondinsulating layer on the substrate, and the second insulating layercovering surfaces of the recesses and top surfaces of the conductivelines; and forming the third insulating layer on the second insulatinglayer and the air gaps being sealed within the third insulating layer.4. The method for manufacturing the interconnect structure with air gapsaccording to claim 3, wherein the step of forming the via structure onthe one conductive line of the plurality of conductive lines furthercomprises: forming at least an opening penetrating the patterned hardmask and the second insulating layer on the conductive lines; andforming a conductive layer in the opening to form the via structure. 5.An interconnect structure with air gap comprising: a substratecomprising an insulating material disposed thereon; a conductive linedisposed in the insulating material, and the insulating material beingdisposed on two sides of the conductive line; at least an air gapdisposed in the insulating material and immediately adjacent to theconductive line; a landing mark disposed on the conductive line and theinsulating material on the two sides of the conductive line, and a widthof the landing mark being larger than a distance between the insulatingmaterial disposed at the two sides of the conductive line; and a viastructure formed on the conductive line, and the via structureelectrically connected to the conductive line.
 6. The interconnectstructure with air gap according to claim 5, wherein the insulatingmaterial upwardly and sequentially comprises a first insulating layer, asecond insulating layer, and a third insulating layer, and an etchingrate of the second insulating layer is different from etching rates ofthe first insulating layer and the third insulating layer.
 7. Theinterconnect structure with air gap according to claim 6, wherein theconductive line is physically and electrically isolated from the air gapby at least the second insulating layer and the third insulating layer.8. The interconnect structure with air gap according to claim 7, whereinthe conductive line is physically and electrically isolated from the airgap by the first insulating layer, the second insulating layer and thethird insulating layer.
 9. The interconnect structure with air gapaccording to claim 6, wherein the landing mark comprises the secondinsulating layer and a patterned hard mask.
 10. The interconnectstructure with air gap according to claim 9, wherein sidewalls of thevia structure contact the patterned hard mask and the second insulatinglayer.
 11. An interconnect layout structure with air gaps comprising: aplurality of air gaps extended along a direction; and at least a firstinterconnect unit disposed in between the air gaps, the firstinterconnect unit comprising: a first conductive line; a first landingmark disposed on the first conductive line, and a width of the firstlanding mark being larger than a distance between the air gaps disposedat two sides of the first conductive line; and a first via structuredisposed on the first landing mark, the first via structure penetratingthe first landing mark and being electrically connected to the firstconductive line, wherein the air gaps arranged in a straight line arephysically separated from each other by the first landing mark.
 12. Theinterconnect layout structure with air gaps according to claim 11,wherein a long side of the first landing mark is perpendicular to thedirection.
 13. The interconnect layout structure with air gaps accordingto claim 11, further comprising a plurality of second conductive linesdisposed on at least one side of the first interconnect unit, the secondconductive lines are expended along the direction, and the secondconductive lines physically contact the first conductive line.
 14. Theinterconnect layout structure with air gaps according to claim 13,wherein a width of the first conductive line is larger than a width ofthe second conductive line.
 15. The interconnect layout structure withair gaps according to claim 13, wherein the first interconnect unitfurther comprises a plurality of insulating material patterns disposedat two sides of the first conductive line, and the first landing mark ofthe first interconnect unit overlaps the insulating material patterns.16. The interconnect layout structure with air gaps according to claim15, wherein the insulating material patterns contact the air gaps. 17.The interconnect layout structure with air gaps according to claim 11,further comprising at least a second interconnect unit, and the secondinterconnect unit comprising a second conductive line, a second landingmark, and a second via structure.
 18. The interconnect layout structurewith air gaps according to claim 17, wherein the first interconnect unitand the second interconnect unit are spaced apart from each other. 19.The interconnect layout structure with air gaps according to claim 17,wherein first interconnect unit physically contacts the secondinterconnect unit.
 20. The interconnect layout structure with air gapsaccording to claim 19, wherein a distance between the first viastructure of the first interconnect unit and the second via structure ofthe second interconnect unit is smaller than a distance between thefirst via structure and an edge of the first landing mark, and smallerthan a distance between the second via structure and an edge of thesecond landing mark.